The ZNX Sensor is a non-contact position measuring system based on the principle of capacitance’
micrometry. Two sensor plates (a Target and a Probe) form a parallel plate capacitor. The spacing of these
two plates can be measured, using the appropriate electronic controller, to better than 0.1 nm, with a range up to 1.25 mm, a frequency response up to 5 kHz and linear to 0.02%. Because the ZNX Sensor is a
noncontact method, it is free of hysteresis. No power is dissipated at the point of measurement.
· Precision measurement to picometres
· Stability of measurement
· Tuneable to meet application requirements
· Options for a wide range of applications
Range 20 ~ 1250μm;
Subnanometer position resolution;
Zero hysteresis;
Linearity error down to 0.02%;
Bandwidth up to 5 kHz;
Super Invar terms available;
Vacuum compatible options;
Linearity Error (%):<0.08, <0.08, <0.06, <0.05;
Short Range μm: 20, 100, 250;
Long Range μm: 50, 100, 500;
Analogue Output: ± 5, ± 5, ± 5, 8;
Maximum Bandwidth: 5, 5, 5, 12.5Khz.
ZNX Sensors can be used for a wide range of applications where precision positioning is critical.
Stage control; Microscopy; Structural deformation; Vibration control; Materials testing; Precision engineering; Active Optics; Precision Beam Steering; Space Station Robot Arm.
Sensor | ZNXB | ZNXC | ZNXD |
Short Range um | 20 | 100 | 250 |
Nominal Scale Factor (um per Volt) | 2 | 10 | 25 |
Noisenm rms Hz-1/2 | <0.001 | <0.005 | <0.013 |
Thermal DriftThermal Drift | 1 | 4.4 | 11 |
Linearity Error% | <0.08 | <0.03 | <0.06 |
Long Range um | 100 | 500 | 1250 |
Nominal Scale Factor (um per Volt) | 10 | 50 | 125 |
Noisenm rms Hz-1/2 | <0.015 | <0.075 | <0.188 |
Thermal DriftThermal Drift | 4.4 | 22 | 55 |
Linearity Error% | <0.08 | <0.05 | <0.06 |
Operating temperature | + 10 ~ + 50 ℃ (controller); - 273 ~ +80 ℃ (probe); | ||
Storage temperature | 0～+70℃ | ||
Relative humidity | 5～95%（no condensation） | ||
Frequency response Hz | 50/500/5000 | ||
Controller | CC2000 | ||
Maximum Number of Sensor Channels | 1 | ||
Power requirements | ±15V，70mA | ||
Analogue Output V | ±5 | ||
Digital Output | |||
Size mm | 218 x 77 x 34 | ||
Maximum Bandwidth KHz | 5 | ||
◆We reserve the right to change the specifications without notice.
ZNX Sensors has been widely used for vibration control or measurement and for position drift measurement.
· Materials testing
· Active Optics
· Precision manufacturing
· Metrology
· Deformation measurements
· Strain measurement (used on space station robotic arm and hand)
· Stage control
· Microscopy
· Precision Beam Steering
ZNX Sensors has been widely used for vibration control or measurement and for position drift measurement.
· Materials testing
· Active Optics
· Precision manufacturing
· Metrology
· Deformation measurements
· Strain measurement (used on space station robotic arm and hand)
· Stage control
· Microscopy
· Precision Beam Steering
